MST Symposium Topics
Sources and mechanisms of particle contamination
Intrinsic and extrinsic
Nanometer to micrometer scale
Factors that influence particle adhesion
Chemistry, topography, shape, size, relative humidity, medium, etc.
Particle adhesion measurement techniques
Forces affecting adhesion: JKR theory, Hamaker theory
Detection, identification and characterization of particles on surfaces
Micrometer scale
Nanometer scale
Techniques for particle removal
Challenge of nanoscale removal
Fluid dynamics of particle removal
Implications of particle contamination
Microelectronic applications
Biomedical applications
Optics and precision tool applications
Thermodynamics of particle removal
Including interactions with fluids, electrolytes and solvents
Detection/Removal of bacteria/viruses considered as particles