MST Symposium Topics

Sources and mechanisms of particle contamination

Intrinsic and extrinsic
Nanometer to micrometer scale

Factors that influence particle adhesion

Chemistry, topography, shape, size, relative humidity, medium, etc.

Particle adhesion measurement techniques

Forces affecting adhesion: JKR theory, Hamaker theory

Detection, identification and characterization of particles on surfaces

Micrometer scale
Nanometer scale

Techniques for particle removal

Challenge of nanoscale removal
Fluid dynamics of particle removal

Implications of particle contamination

Microelectronic applications
Biomedical applications
Optics and precision tool applications

Thermodynamics of particle removal

Including interactions with fluids, electrolytes and solvents

Detection/Removal of bacteria/viruses considered as particles